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Single-Side Polisher
TSP-400/450 series
This series of polishing machines comprises floor-type high-precision single-sided polishing equipment. These machines are equipped with a polishing disc cooling and temperature monitoring system to ensure a constant temperature during the polishing process. Featuring easy-to-use controls and abundant configuration options, the equipment is used with copper, tin, glass, and stainless steel discs (turning tool system optional). It can also be used with different types of polishing solutions and is suitable for polishing various semiconductor materials.
  • Plate Specifications

    OD400 mm

  • Number of Polishing Heads

    2

  • Polishing Head Pressure Mode

    Weights/Vacuum head

  • Polishing Head Swing Function

    Own

  • Features
    Pressurizing method
    Vacuum pressure head/pressurizing by weight
    Drive mode
    Polishing head rotates and swings at meantime
    Constant temperature control
    Temperature control system for polishing plate
    Process optimization
    The surface shape of polishing head is adjustable
    Slurry supply method
    Adjustable flow peristaltic pump for liquid supply&vacuum jet for liquid supply